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High Purity Alumina Ceramic Shield Rings For Semiconductor Etching Equipment | Vacuum Chamber Protection Rings With Custom Sizes And High Temperature

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High Purity Alumina Ceramic Shield Rings For Semiconductor Etching Equipment | Vacuum Chamber Protection Rings With Custom Sizes And High Temperature

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MOQ : As Negotiated and Agreed

Certification : GB/T 19001-2016/ISO 9001:2015

Flexural Strength : 200 - 400 MPa

Temperature Resistance : Up to 1600°C

Material : ≥95% alumina powder

Purity : Typically 95% - 99.9%

Coefficient Of Thermal Expansion : 7 - 8 x 10^-6 /°C

Delivery Time : depend on the actual product

Bulk Density : >3.63

Price : as negotiated and agreed

Packaging Details : Carton，Wooden Case

Maximum Use Temperature : 1700c

Max Operating Temperature : 1700°C

Dielectric Strength : 10 - 15 kV/mm

Payment Terms : FOB

Volume Resistivity : 10^14 Ω·cm

Chemical Composition : Al2O3 (Aluminum Oxide)

Mechanical Strength : Very High

Applications : Electrical insulators, wear parts, cutting tools, medical devices

Place of Origin : Made In China，Zhejiang，Jinhua

Model Number : Depend on the Actual Product

Fracture Toughness : 3 - 4 MPa·m^0.5

Low Dielectric Loss : 0.0002

Brand Name : Dayoo

Supply Ability : Factory

Electrical Insulation : High

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High Purity Alumina Ceramic Shield Rings

Alumina ceramic shield rings are high-performance annular protective components manufactured from high-purity alumina (Al₂O₃ content 95%-99.99%). These ivory white or beige-yellow components feature dense texture and high surface finish, designed to provide protection, isolation, support, and insulation functions in various equipment applications.

Primary Applications
Application Field Specific Uses
Semiconductor Manufacturing Etching equipment chamber protection, plasma bombardment barrier, deposition process mask
Vacuum Coating Equipment Protective ring surrounding heaters and susceptors, sputtering process anti-deposition shield
Electronics and Electrical High-voltage insulation shield rings, electronic component protective sleeves, vacuum feedthrough insulators
Chemical and Metallurgical Reactor liner protection, high-temperature furnace supports, corrosion-resistant pipe sleeves
Mechanical Seals Pump and valve seal shield rings, bearing protection rings, wear-resistant component bushings
Core Advantages
  • Excellent protective performance against plasma bombardment, chemical corrosion, and mechanical wear
  • Ultra-high hardness and wear resistance (Mohs hardness 9)
  • Excellent thermal stability with maximum operating temperature up to 1750-1800℃
  • Outstanding electrical insulation (volume resistivity >1×10¹⁴ Ω*cm)
  • Excellent chemical stability resistant to acid and alkali corrosion
  • Precise dimensional control with micron-level tolerances
  • Non-toxic and environmentally friendly material
Technical Specifications
Parameter Typical Value/Range Remarks
Alumina Content 95% - 99.99% Customizable according to requirements
Bulk Density 3.64 - 3.98 g/cm³ Increases with purity
Flexural Strength 310 - 380 MPa Up to 500MPa or more
Compressive Strength 2550 - 3500 MPa Extremely strong load-bearing capacity
Hardness 14 - 30 GPa (≈1440-3060 kg/mm²) Increases with purity
Dielectric Strength 16.9 - 24 kV/mm Excellent electrical safety performance
Volume Resistivity >1×10¹⁴ Ω*cm Extremely high at room temperature
Thermal Expansion Coefficient 7.2 - 8.4 ×10⁻⁶ /℃ (20-1000℃) Good dimensional stability
Thermal Conductivity 32 - 42 W/m*K Increases with purity
Maximum Operating Temperature 1600 - 1800 ℃ Under no-load conditions
Thermal Shock Resistance 220 - 320 ℃ Withstands rapid temperature changes
Water Absorption 0% Fully dense, good airtightness
External Dimensions OD 50-500mm, Thickness 5-50mm Customizable according to drawings
Manufacturing Process
  1. Raw Material Preparation: High-purity alumina powder ball-milling and mixing
  2. Molding Process: Dry pressing, isostatic pressing, or hot pressing casting
  3. Green Body Machining: Trimming after molding with machining allowance
  4. High-Temperature Sintering: Pressureless sintering at 1600-1700℃
  5. Precision Machining: Grinding and lapping using diamond abrasives
  6. Quality Inspection: Full dimensional and performance testing
  7. Cleaning and Packaging: Vacuum or cleanroom packaging
Installation & Usage Guidelines
Installation Precautions:
  • Confirm installation orientation and positioning surfaces
  • Perform trial assembly before formal installation
  • Use soft pads or gloves when handling
  • Ensure clean contact surfaces free of particles
  • Consider shrink fit assembly for interference fits
After-Sales Service
  • Customization service for dimensions, purity, and tolerances
  • Professional technical consultation and design guidance
  • 100% inspection before shipment with material reports
  • 24-hour response to customer issues
  • Strict batch-to-batch consistency control
  • Small batch support for R&D and trial production
Frequently Asked Questions
Q1: What is the difference between alumina ceramic shield rings and ordinary ceramic rings?
A: Shield rings are specifically designed for protection functions with precise positioning surfaces, step structures, and strictly controlled fit dimensions to ensure accurate resetting with each replacement.
Q2: What temperature can the product withstand? How is its thermal shock resistance?
A: Maximum operating temperature reaches 1750-1800℃ for high-purity alumina. Thermal shock resistance is approximately 220-320℃, capable of withstanding thermal shock tests with 500℃ temperature differences.
Q3: What level of dimensional accuracy can the shield rings achieve?
A: Standard products achieve outer and inner diameter tolerances of ±0.05mm. Precision grinding can achieve tolerances up to ±0.01mm, with concentricity and parallelism controlled within 0.02mm.
Q4: Are ceramic shield rings easy to break? What should be noted during installation?
A: Alumina ceramics have high hardness but some brittleness. Avoid hammering, dropping, or forced hammering during installation. Use shrink fit assembly or flexible gaskets, and wear gloves when handling.
Q5: Can shield rings be reused after cleaning?
A: Yes, as long as there are no cracks or chipping on the surface. Inspect critical dimensions and surface condition after each cleaning cycle.
Q6: Do you provide samples for testing? What is the minimum order quantity?
A: Small batch samples are available for testing and verification. Minimum order quantities for batch orders are negotiable based on product size, with special support for R&D requirements.
High Purity Alumina Ceramic Shield Rings For Semiconductor Etching Equipment | Vacuum Chamber Protection Rings With Custom Sizes And High Temperature
High Purity Alumina Ceramic Shield Rings For Semiconductor Etching Equipment | Vacuum Chamber Protection Rings With Custom Sizes And High Temperature
High Purity Alumina Ceramic Shield Rings For Semiconductor Etching Equipment | Vacuum Chamber Protection Rings With Custom Sizes And High Temperature

Product Tags:

alumina ceramic shield rings

      

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